Substrate Structures and Methods
作者： Francisco Machuca , Indranil De
DOI:
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摘要: A process for separating a substrate from an epitaxial layer comprises forming multilayer comprising substrate, lattice matching and layer. The method further etching the by one of liquid or vapor phase acid. is metal alloy between serves as release can also be separated laser lift off process. layer, directing light at maintaining on sufficient period time so that it absorbed free electrons in to allow decomposition
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