Method of manufacturing thin organic film

摘要: An inactive gas is introduced into an organic material evaporation source to place a thin film in the atmosphere having relatively high pressure, and temperature of increased up certain temperature. Then, evacuated lower pressure around for thereby causing emit vapor. Since no wasteful vapor emitted from material, effectively utilized. Because acts as heating medium, at rate, uniformly heated. When lowered atmosphere, it can be rate. The directly by on-off valve, time required evacuate reduced. A liquid may heated medium source, so that will not higher than hence suffer bumping due overshooting.