Method for supplying metal organic gas and an apparatus for realizing same
作者： Kazuo Sato
DOI:
关键词: Analytical chemistry 、 Phase (matter) 、 Chemistry 、 Trimethylaluminium 、 Constant (mathematics) 、 Pressure difference 、 Metal 、 Pressure reactor 、 Thin film
摘要: In a reduced pressure gaseous phase thin film growth device, in which the within bubbler is detected during bubbling of an organo-metallic compound and depending on thus detected, difference valve disposed between pipe for introducing trimethylaluminium gas reactor controlled so that kept to be constant.
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