Ampoule for liquid draw and vapor draw with a continuous level sensor
作者： Pravin K. Narwankar , Alan H. Ouye , Paul Chhabra , Shreyas S. Kher , Dien-Yeh (Daniel) Wu
DOI:
关键词: Chemical engineering 、 Analytical chemistry 、 Level sensor 、 Source material 、 Scientific method 、 Chemistry 、 Vaporizer 、 Ampoule
摘要: A method and apparatus for providing a precursor to process chamber is described. The comprises an ampoule capable of receiving either liquid source material or solid material. delivering vaporizer coupled the chamber, vaporized gaseous chamber. also includes continuous level sensor accurately monitor within ampoule.
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