作者: Sally Seidel
DOI: 10.1016/S0168-9002(01)00695-7
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摘要: Abstract Methods have been developed to improve the reliability of silicon sensors, in particular for pixel detectors, and their resistance radiation damage, as it is encountered tracking detectors particle physics experiments. The choice wafer material, processing techniques, sensor layout are discussed. Alternative semiconductor substrates variations on planar hybrid design mentioned.