Precise ultrananocrystalline diamond nanowire arrays for high performance gas sensing application

摘要: Abstract We report that the boron-doped Ultrananocrystalline diamond (UNCD) nanowires with extremely high length to diameter ratio and oxygen functional groups possess an intrinsic nature capable of adsorbing carbon monoxide (CO) molecules. The purpose is develop performance UNCD nanowire arrays gas sensor. Highly flat thin film thickness 70 nm was firstly grown on Si substrate. main consists a large amount grain size smaller than 10 nm. Successive processes were performed afterward fabricate three arrays. Then sensing performances fabricated devices different structures including serial connection parallel evaluated. Furthermore, corresponding kinetic model mechanism have also been discussed. Small size, existence ascribed as key factors for promoting CO adsorption largely enhances device performances.