作者: Jascha Lukas Gugat , Matthias C. Krantz , Julius Schmalz , Martina Gerken
DOI: 10.1109/TMAG.2016.2557305
关键词:
摘要: The signal-to-noise ratio (SNR) is investigated for compound magnetoelectric (ME) sensors on cantilever substrates (SUBs) the detection of low-level magnetic fields. Operated at mechanical resonance, field deforming magnetostrictive (MS) layer causes a resonant bending-mode response in ME cantilever. deformation piezoelectric (PE) allows extraction voltage or charge signal. Here, influence PE thickness and electrode length SNR evaluated theoretical study. signal levels are calculated using finite-element method. Noise voltages including intrinsic electric noise sensor amplifier case amplifier. AlN PZT considered as materials. For geometry with 10 mm-length, mm-width, 300 $\mu \text{m}$ -thick silicon SUB Metglas MS 2 thickness, limit (LOD) pT-range predicted $2~\mu layers, while LOD approximately one order magnitude worse. A doubling obtained choosing an upper covering only fixed side Operation shows least $\sim 50$ % better values compared amplification.