Gas sensor using high-frequency quartz crystal microbalance
作者： S. Kurosawa , Dae-Sang Han , Jong-Won Park , H. Aizawa , M. Yoshimoto
关键词:
摘要: Fundamental modes (9 & 50 MHz) and overtone of 3rd mode 33 MHz (100(3) 5th 20 (100(5) quartz crystal microbalances. (QCMs) with high frequencies are studied to increase the frequency response QCM gas-sensor. On fundamental modes, ratio mass sensitivity QCMs calculated from theory is consistent that experimental results.
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