Resonant Properties of GaPO4 Resonator Device Coated with Plasma Polymerized Styrene Film

作者: Hidenobu Aizawa , Yoshiharu Inoue , Kazunori Yamada , Mitsuo Hirata , Mitsuaki Koyama

DOI: 10.1109/FREQ.2006.275405

关键词:

摘要: Recently, quartz crystal microbalance (QCM) techniques have found widely applications in chemical and biosensor. The of AT-cut used for the QCM method. This cutting mode device shows good temperature-compensated behavior resonant frequency around room temperature, but maximum operating temperature is limited due to phase transition near 570 degree C. For this weak point, technique low under 200 degrees In study, properties GaPO4 resonator coated with plasma-polymerized styrene film (PPSF) as mass loading effect were examined compared that device.

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