Method of forming split-gate cell for non-volative memory devices
作者： Siow Lee Chwa , Yoke Leng Lim , Soh Yun Siah , Huajun Liu , Yu Chen
DOI:
关键词:
摘要: Fabrication of a slim split gate cell and the resulting device are disclosed. Embodiments include forming first on substrate, having an upper surface hard-mask covering surface, interpoly isolation layer side surfaces hard-mask, second one gate, with uppermost point below removing spacers exposed vertical surfaces, salicide gates.
lens.org 参考文章(10)
Asanga H. Perera, Non-volatile memory (NVM) and high-k and metal gate integration using gate-first methodology ,(2013)
Tomoya Saito, Seiki Ogura, Kimihiro Satoh, Twin monos cell fabrication method and array organization ,(2003)
Taku Kanaoka, Yoshio Fukayama, Masashi Sahara, Yutaro Ebata, Kazuhisa Higuchi, Koji Fujishima, Semiconductor Device and a Method of Manufacturing the Same ,(2006)
D. Shum, J. R. Power, R. Ullmann, E. Suryaputra, K. Ho, J. Hsiao, C. H. Tan, W. Langheinrich, C. Bukethal, V. Pissors, G. Tempel, M. Rohrich, A. Gratz, A. Iserhagen, E. O. Andersen, S. Paprotta, W. Dickenscheid, R. Strenz, R. Duschl, T. Kern, C. T. Hsieh, C. M. Huang, C. W. Ho, H. H. Kuo, C. W. Hung, Y. T. Lin, L. C. Tran, Highly Reliable Flash Memory with Self-Aligned Split-Gate Cell Embedded into High Performance 65nm CMOS for Automotive & Smartcard Applications international memory workshop. pp. 1- 4 ,(2012) , 10.1109/IMW.2012.6213670
Robert F. Steimle, Erwin J. Prinz, Michael A. Sadd, Split gate memory cell and method therefor ,(2005)
Robert F. Steimle, Erwin J. Prinz, Ko-Min Chang, Silicided nonvolatile memory and method of making same ,(2006)
Sung-Taeg Kang, Gowrishankar L. Chindalore, Matthew T. Herrick, Ko-Min Chang, Method of making a split gate memory cell ,(2009)
Sung-taeg Kang, Robert F. Steimle, Rode R. Mora, Split gate memory cell method ,(2006)
Robert F. Steimle, Gowrishankar L. Chindalore, Matthew T. Herrick, Method of forming a split gate non-volatile memory cell ,(2007)
Sung-taeg Kang, Cheong Min Hong, Split gate flash cell ,(2012)