Filter and duplexer
作者： Yasuyuki Saitou , Masafumi Iwaki , Masanori Ueda , Takeshi Sakashita , Tsuyoshi Yokoyama
DOI:
关键词:
摘要: A filter includes one or a plurality of parallel resonators coupled in and film bulk acoustic series, the resonator having substrate, lower electrode, piezoelectric membrane, an upper wherein: at least electrode has thick membrane region thickness larger than that center portion resonance edge region, being where face with each other through membrane; width is smaller wavelength wave propagating direction crossing membrane.
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