ELECTROSTATIC TYPE VIBRATION ACTUATOR

摘要: PROBLEM TO BE SOLVED: To vibrate a vibrator with smaller voltage. SOLUTION: In order to 26 of an angular velocity sensor 21 in the direction arrow (a), comb-shaped vibration generating section 35 is constituted mobile side electrode 27 and fixed 31 flat 36, 28 32. Firstly, clearance between electrodes 32 reduced by initial force generated from 35. With access 32, larger additional 36 apply large following force. This enables substantially voltage thereby enhancing detection sensitivity 21.