Sensing device and sensor apparatus

摘要: A sensing device, such as an angular speed detecting includes a vibrator for improving detection precision. The is displaceably supported on substrate and vibrated in the direction of X-axis by driving electrodes. Detecting electrodes detect vibrations Y-axis caused Coriolis' force resulting from occurring about Z-axis. Each movable electrode that connected to displaced together therewith fixed onto manner face electrode. By equalizing conductors length, width, thickness, respectively, one electrical characteristic set those wiring portions which function same manner.