Angular velocity sensor device

摘要: PROBLEM TO BE SOLVED: To provide an angular velocity sensor device which can amplify only signals at a high amplification rate by canceling out crosstalk voltages generated via parasitic capacities and thus enhance the sensitivity of sensor. SOLUTION: An 10 comprises sensing part 1a signal processing circuit 1b. Drive wiring L1, L2 is brought to driving terminals L1a, L2a from electrodes e1, e2 1c 1a. A detecting pattern L3 one electrode e3 terminal L3a. From other e4, L4 compensating L5 are out, respectively, L4a guaranteeing L5a. Parasitic C 51 , 13 32 24 between patterns made satisfy bridge parallel condition .C =C cancel appearing L3b, L4b. COPYRIGHT: (C)1998,JPO