Dual-mass micromachined vibratory rate gyroscope

摘要: A microfabricated gyroscopic sensor for measuring rotation about a Z-axis. The includes substrate, first mass, second coupling system connecting the mass and suspension to substrate. further drive cause vibrate in an antiphase mode along axis, position measure displacement of sense axis perpendicular generally parallel surface wherein Z-axis substrate vibration generates Coriolis force each other.