Optical properties of native oxides on InP

作者: Y. Robach , A. Gagnaire , J. Joseph , E. Bergignat , G. Hollinger

DOI: 10.1016/0040-6090(88)90196-4

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摘要: Abstract The optical properties of anodically, thermally, and chemically grown oxides on InP have been studied using a spectroellipsometric method. dielectric functions the main compounds obtained in spectral range 1.8–5.2 eV. interface these native studied.

参考文章(6)
G. Hollinger, E. Bergignat, J. Joseph, Y. Robach, On the nature of oxides on InP surfaces Journal of Vacuum Science and Technology. ,vol. 3, pp. 2082- 2088 ,(1985) , 10.1116/1.572928
E. Bergignat, G. Hollinger, Y. Robach, A study of thermal oxide-InP interaces Surface Science. ,vol. 189, pp. 353- 361 ,(1987) , 10.1016/S0039-6028(87)80453-3
A. A. Studna, G. J. Gualtieri, Optical properties and water absorption of anodically grown native oxides on InP Applied Physics Letters. ,vol. 39, pp. 965- 966 ,(1981) , 10.1063/1.92627
G. Hollinger, On the chemistry of passivated oxide–InP interfaces Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 5, pp. 1108- 1112 ,(1987) , 10.1116/1.583737