Simulated laser spot enlargement
作者： Donald R. Cutler
DOI:
关键词:
摘要: An fast steering mirror ( 30 ), such as a PMN actuated mirror, is positioned in beam path 18 ) of stage-based positioning system 40 to continuously move laser 46 high speed prescribed pattern about nominal target position 60 spatially separate focused spots 48 generated at repetition rate and thereby create geometric features having dimensions greater than those the spot ). A series given appear larger diameter lower pulse without quality problems associated with working out focus.
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