Specific features of ion-initiated processes during pulsed laser deposition of MoSe 2 coatings in pulsed electric fields

摘要: Experimental data and results of mathematical modeling have been used to determine the energy characteristics an ion beam assist pulsed laser deposition (PLD) MoSe2 layers under conditions positive high-voltage pulses applied a laser-ablated target. It is shown that PLD assisted by implantation ions at energies up 100 keV can be obtain coatings on 57Fe-containing substrates. Analysis concentration-depth profiles Mo, Se, 57Fe atoms phase composition near-surface layer in samples shows evidence for mass transfer domination thermal spikes significant influence impact structure this nanoscale. These features are manifested formation nanocomposite with inclusions specific hexagonal FeSe phase. The obtained demonstrate existence principally new possibilities using proposed modified method controlled solid lubricant improved properties.