Improved Scanning Electron Diffraction System

作者: C. W. B. Grigson

DOI: 10.1063/1.1719398

关键词:

摘要: An improved transmission scanning electron diffraction system is described. It can make angular measurements comparable with those of photographic instruments, its intensity have an accuracy ±0.2% for single traces, ±1% complete frames, sensitivity sufficient to give clear signals from specimens average thickness equal atomic layer, resolving power 0.23 mrad. Important features the are a high productivity rate so that many be grown within instrument and examined in short time; ability record patterns continuously as films by vacuum deposition growth rate/vacuum values up 107 A sec−1 Torr−1; scan two dimensions. Scan rates depend on response speed X‐Y recorder used 10–50 sec trace, 20–60 min entire frame crystal film. The design discussed results polycrystal...

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