Microelectromechanical resonator and method for fabrication
作者： Roy H. Olsson , Jonathan W. Wittwer
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摘要: A method is disclosed for the robust fabrication of a microelectromechanical (MEM) resonator. In this method, pattern holes formed in resonator mass with position, size and number being optimized to minimize an uncertainty Δf resonant frequency f0 MEM due manufacturing process variations (e.g. edge bias). different types resonators are which can be using including capacitively transduced Lame, wineglass extensional resonators, piezoelectric length-extensional resonators.
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