Mems resonator array structure and method of operating and using same

摘要: Resonators arranged in an NxM MEMS array structure includes substantially straight elongated beam sections connected by curved/rounded sections. Each resonator is mechanically coupled to at least one adjacent of the via a coupling section, each section another distal end forming geometric shape, and are disposed between resonators. The resonators, when induced, oscillate same frequency, combined elongating/breathing bending modes, (i.e, exhibiting elongating/breathing-like bending-like motions). One or more structure's resonators may include nodal points stationary and/or experience little movement), which suitable preferable locations anchor resonator/array substrate, areas curved