Microelectromechanical system (MEMS) microphone with protection film and MEMS microphonechips at wafer level
作者： Cheng-Wei Tsai , Chien-Hsing Lee , Jhyy-Cheng Liou
DOI:
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摘要: A method to protect an acoustic port of a microelectromechanical system (MEMS) microphone is provided. The includes: providing the MEMS microphone; and forming protection film, on microphone. film has porous region over receive signal but resist at least intruding material. can endure processing temperature solder flow.
google.co.uk 参考文章(24)
Chin-Fu Kuo, Yao-Jung Lee, Li-Chi Pan, Tzong-Che Ho, Hsin-Li Lee, Microphone package structure and method for fabricating the same ,(2011)
Mengjin Cai, Zhe Wang, Silicon based MEMS microphone, a system and a package with the same ,(2011)
Alfons Dehe, Guenther Ruhl, MEMS Acoustic Transducer, MEMS Microphone, MEMS Microspeaker, Array of Speakers and Method for Manufacturing an Acoustic Transducer ,(2013)
Andrew J. Doller, Michael J. Daley, Brett M. Diamond, Phillip Sean Stetson, John M. Muza, Franz Laermer, Epitaxial silicon CMOS-MEMS microphones and method for manufacturing ,(2012)
Benedetto Vigna, Sebastiano Conti, Mario Francesco Cortese, Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof ,(2009)
Ralf Corin, A sound dampening flow channel device ,(2006)
Jochen F. Kuhmann, Peter U. Scheel, Matthias Mullenborn, Silicon-based sensor system ,(2000)
Tsung-Min Hsieh, Chien-Hsing Lee, Method for fabricating micro-electro-mechanical system (MEMS) device ,(2008)
Xiao (Charles) Yang, Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processes ,(2009)
Kieran P. Harney, Jia Gao, Aleksey S. Khenkin, MEMS microphone system for harsh environments ,(2012)