A study of the electron quenching of excimers in a KrF* laser excited by a coaxial electron beam
作者： P. J. M. Peters , H. M. J. Bastiaens , W. J. Witteman , T. Gerber
DOI: 10.1007/BF00692496
关键词:
摘要: Measurements of the output energy, optical pulse length and build-up time laser pulse, obtained with a coaxially e-beam pumped KrF* laser, were performed varying total gas fill pressure, F2 content current from 1–5 bar, 0.1–0.8% 13.3–26.6 kA, respectively. The maximum specific extraction energy amounts to 64 J/l. large range measurements, especially at low concentrations, reveals necessity extend kinetics chain in usual computer model. With introduction electron quenching ArF* by dissociative attachment predictions are also for concentration agreement experiments.
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