All-silicon polarizing filters for near-infrared wavelengths

摘要: We discuss the design and fabrication of optical filters that are transparent to a preferred linear polarization, but partially or substantially reflective orthogonal polarization. The fabricated by depositing thin films form-birefringent silicon onto wafers using serial bideposition method. Characteristic curves presented for in-plane principal refractive indices np ns porous as functions vapor impingement angle facilitate critical aspects filter design. These include matching p index an s deposited at different angles, realization satisfy antireflection condition substrate in air.