Charged particle beam apparatus, method for controlling charged particle, and frequency adjustment apparatus

摘要: An ion gun 11 supplies an Ar gas into a main body 111 from inlet 114, causes DC hot cathode discharge between filament 113 and anode 112 to generate plasma. Next, voltage gradient is applied separated accelerator grids 116 a, b having bi-separated configuration in ejecting direction. The each potential of the independently controlled by setting control switches 121 on or off change that which corresponds beam be disabled.