Semiconductor devices and structures
作者： Gurtej S. Sandhu
DOI:
关键词:
摘要: A semiconductor device structure is disclosed. The includes a mesa extending above substrate. has channel region between first side and second of the mesa. gate on mesa, comprising insulator conductor graphene overlying insulator. may comprise in one or more monolayers. Also disclosed are method for fabricating structure; an array vertical transistor devices, including devices having disclosed; devices.
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