Deposition apparatus and method of manufacturing organic light emitting display apparatus using the same
作者： Su-Hyuk Choi
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摘要: A deposition apparatus includes a chamber, substrate placing unit which is located in the chamber and on placed, sputter for forming thin film substrate. The first target second facing unit. pair of targets are mounted each Argon gas directly injected between targets. Accordingly, plasma may be more effectively stably formed. method manufacturing an organic light-emitting display using also disclosed.
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