Photodiode of high quantum efficiency
作者： Salim Boutami , Sebastien Jouan , Michel Marty , Laurent Frey
DOI:
关键词:
摘要: A photodiode includes at least one central pad arranged on a light-receiving surface of semiconductor substrate. The is made first material and lateral sidewalls surrounded by spacer second having different optical index than the material. dimensions are smaller an operating wavelength photodiode. Both materials transparent to that wavelength. pads spacers formed same time gate electrodes sidewall MOS transistors formed.
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