Fabrication method of double-slit-grating for high resolution microspectrometers
作者： Zhiyou Zhang , Yukun Zhang , Shuhong Li , Jinglei Du , Fuhua Gao
DOI: 10.1016/J.MEE.2012.07.064
关键词:
摘要: In this paper, a double-slit-grating (DSG) is presented for improving the spectral resolution of microspectrometer. We try to develop simple and low-cost fabrication method by synthetically using interference lithography, ion etching technique localized surface plasmon imaging lithography: A grating was first obtained with traditional then it copied transparent material polydimethylsiloxane (PDMS) form soft mask, which can contact silver superlens firmly, finally DSG will be fabricated though lithography. This enhance microspectrometers 0.1nm level. made metal has rich characteristics sensibility, makes suitable biomedical sensors.
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