MICRO FORCE SENSOR BY CAPILLARY FORCE AND ITS EVALUATION METHOD AND APPARATUS
作者： Takao Yasumasa , Shimada Yasuhiro , Sunada Hisakazu
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摘要: PROBLEM TO BE SOLVED: To evaluate observed values of adhesion between particles. SOLUTION: In the method for evaluating a micro force generated two objects A and B opposed to in contact with each other; its sensor; evaluation apparatus, (1) assuming presence spring-like substance prescribed spring constant supporting or B, is computed on basis frequency amount displacement when are desorbed mass (2) which occurs any object C except made present part plurality groups desorbed. COPYRIGHT: (C)2007,JPO&INPIT
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