Particle adhesive force measuring apparatus and adhesive force measuring method

摘要: PROBLEM TO BE SOLVED: To provide a particle adhesive force measuring apparatus capable of directly the among fine particles. SOLUTION: This is provided with sample substrate to which particles 15 adhere, plate spring 17 vertically disposed lower part thereof fixed, contact stylus 14 supported on upper be axially displaceable, stage 7 for moving 10 in axial direction 14, and laser displacement meter 18 14. With adhering tip moved withdrawing from separate 10, thereby particle.