Applications of Low-Energy Ion Scattering

作者: H. H. Brongersma , L. C. M. Beirens , G. C. J. Ligt

DOI: 10.1007/978-1-4684-0856-0_3

关键词:

摘要: Low-energy (0–10 keV) ion scattering (LEIS, ISS or NIRMS) is used for obtaining information on the atomic composition and structure of surfaces. The extreme sensitivity technique to outermost layer gives it unique properties as compared with other analytical techniques.

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