Surface conductivity induced by fullerenes on diamond: Passivation and thermal stability

摘要: Abstract The surface conductivity of hydrogen terminated diamond under atmospheric conditions is a well known phenomenon. Inspired by the transfer doping model [F. Maier, M. Riedel, B. Mantel, J. Ristein, L. Ley, Phys. Rev. Lett. 85, (2000) 3472] we have recently investigated thin C60 layers as an alternative to adsorbates. We could indeed show that induces sub-surface accumulation layer results in comparable air induced one [P. Strobel, Nature 430, (2004) 439]. In present work investigate fluorinated fullerenes, namely C60F18, C60F36, and C60F48, dopants. fullerenes increases with higher fluorination achieves for C60F48 level exceeds observed up factor three. Furthermore, study thermal stability fullerene on their stabilisation passivation different dielectric films (SiO, CaF2, Si3N4). case observe significant improvement after dielectrics but pristine cannot be kept. A kind achieved C60. After simultaneous exposure oxygen, light, temperature about 150 °C stable 350 vacuum undiminished efficiency. ascribe this effect oxygen mediated polymerisation layer.