Capacitor having tantalum oxynitride film and method for making same
作者： Dan Gealy , Husam N. Al-Shareef , Randhir P. S. Thakur , Scott Jeffrey DeBoer
DOI:
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摘要: A capacitor has a tantalum oxynitride film. One method for making the film comprises forming bottom plate electrode and then oxide on electrode. Nitrogen is introduced to form top formed
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