Evaluation of diamond gauge factor up to 500 °C
作者： Akira Yamamoto , Nawachi Norio , Tsutsumoto Takahiro
DOI: 10.1016/J.DIAMOND.2007.02.010
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摘要: Abstract Gauge factors of boron-doped polycrystalline diamond films were investigated in the ranges from room temperature to 500 °C and 0 0.07 MPa applied pressure. A VCR fitting was used as a package for measurement at high temperature. Undoped deposited on Si substrate by hot filament chemical vapor deposition (CVD) method. chip fabricated with bulk micro machining technique. The gauge evaluated furnace. calculated values found vary range 5–241. decreased increased around 100–300 °C. However, higher up 500 °C, it increased.
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