Elevated ion charge states in vacuum arc plasmas in a magnetic field

作者： E. M. Oks , I. G. Brown , M. R. Dickinson , R. A. MacGill , H. Emig

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摘要: We report on measurements of the charge state distributions ions formed in a vacuum arc plasma magnetic field. A ion source was used for formation and beam extraction, spectra were investigated using both time‐of‐flight diagnostics. find that states all metal species are significantly increased by field up to 6 kG. New high created, mean distribution is about 30% at 3.75 kG 50% The results important fundamentally as well being relevance applications such implantation accelerator injection.