Micromachined piezoelectric force sensors based on PZT thin films
作者： Chengkuo Lee , T. Itoh , T. Suga
DOI: 10.1109/58.503715
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摘要: … is made by sputtering a I-,urn-thick PZT layer on a about 28pm-thick silicon supporting beam… This paper demonstrates a new application of PZT thin film to microelectromechanical …
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