Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

摘要: Abstract In this paper, new silicon nitride cantilevers integrated with heaters and piezoelectric sensors have been developed to obtain an improved uniformity of the initial bending mechanical stability cantilever array for thermo-piezoelectric probe-based data storage. This showed thickness less than 2%. Data bits 40 nm in diameter were recorded on PMMA film. Sensitivity sensor was measured be 0.615 fC/nm after poling, implying that indentations 20 nm depth can detected. Finally, 128 × 128 probe high speed operation.