Nanomechanics: Fundamentals and Application in NEMS Technology

作者: Marcel Lucas , Tai De Li , Elisa Riedo

DOI: 10.1007/978-0-387-76499-3_9

关键词:

摘要: A nano-electromechanical system (NEMS) combines nanometer-sized actuators, sensors and electronic devices into a complex circuit. An intense effort has been made to develop versatile NEMS for the miniaturization of existing design new ones, with wide range applications in field electronics, chemistry biology. All require good understanding mechanical properties at nanoscale their influence on other physical/chemical properties. In this chapter, size dependence nanostructures is discussed detail surface effects, defects phase transitions reviewed. The most commonly used techniques studying are described potential biological/chemical sensing, data storage, telecommunications electrical power generation also presented.

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