Origin of the spatial resolution in atom probe microscopy
作者： Baptiste Gault , Michael P. Moody , Frederic de Geuser , Daniel Haley , Leigh T. Stephenson
DOI: 10.1063/1.3182351
关键词:
摘要: Atom-probe microscopy offers unprecedented insights on the subnanometer structure and chemistry of materials in three dimensions. The actual spatial resolution achievable is however still an uncertain parameter, as no comprehensive study has been undertaken to unveil physics underpinning how key parameters impact performance. Here, we present a investigation in-depth lateral technique. We discuss methods estimate show better than 20 pm in-depth. Models support our results were developed are discussed letter.
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