A novel method for acquiring large‐scale automated scanning electron microscope data

作者: A.R. SHIVELEY , P.A. SHADE , A.L. PILCHAK , J.S. TILEY , R. KERNS

DOI: 10.1111/J.1365-2818.2011.03524.X

关键词:

摘要: Summary Recent software and hardware advances in the field of electron backscatter diffraction have led to an increase rate data acquisition. Combining automated stage movements with conventional beam control allowed researchers collect from significantly larger areas samples than was previously possible. This paper describes a LabVIEW™ AutoIT© code which allows for increased flexibility compared commercially available software. The source this has been made online version paper.

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