Biocompatible compact micropump with integrated unidirectional microvalves for low pressure microfluidic applications

摘要: Abstract In this paper we present a new architecture of miniaturized micropump intended for drug delivery and low pressure biomedical applications. The analyzed is fabricated with rapid casting sugar glass. A custom glass 3D printer was used the negative template micropump. main advantage developed system its complexity embedded microvalves at inlet outlet ports where only moving part pumping membrane. Two membrane fabrication techniques have been tested, i.e. based approach spin-coating technique. Several structural configurations investigated discussed such as number membranes, their thickness cantilevers, which form microvalve. Results showed that proposed structure robust maximum supported by 69 kPa. stable measured flow rate 7 μL/min 114 mW power-supply. Overall dimensions complete are 20 mm × 20 mm × 10 mm chamber volume 31 mm3.