Performance improvement of CMOS-MEMS Pirani vacuum gauge with hollow heater design
作者： Yi-Chiang Sun , Kai-Chih Liang , Chao-Lin Cheng , Ming-Yie Lin , Rong-shun Chen
DOI: 10.1109/TRANSDUCERS.2015.7181111
关键词:
摘要: … CMOS-MEMS Pirani vacuum gauge. The Pirani vacuum gauge is a thermal-based pressure … ; (3) Easily integrate with other packaged CMOS-MEMS devices for pressure monitoring [1]. …
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