Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation
作者： F Santagata , J F Creemer , E Iervolino , P M Sarro
DOI: 10.1088/0960-1317/22/10/105025
关键词: Optoelectronics 、 Pirani gauge 、 Silicon 、 Vacuum level 、 Microelectromechanical systems 、 Thin film encapsulation 、 Detection limit 、 Nanotechnology 、 Deflection (engineering) 、 Small footprint 、 Materials science
摘要: … Pirani gauges made as a MEMS (micro-electro-mechanical … is the other heat sink of the Pirani gauge besides the silicon … poly-Si tube within a SiN layer, a dry etching of the poly-Si …
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