Effects of texture on the dielectric properties of Ba(Zr0.2Ti0.8)O3 thin films prepared by pulsed laser deposition
作者： X.G. Tang , X.X. Wang , K.H. Wong , H.L.W. Chan
DOI: 10.1007/S00339-004-2980-8
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摘要: Ba(Zr0.2Ti0.8)O3 (BZT) thin films were deposited on Pt(111)/Ti/SiO2/Si(100) substrates by a pulsed laser deposition process. The BZT directly grown annealed and un-annealed Pt/Ti/SiO2/Si exhibited random high (100) orientations, respectively. dielectric constant of 400-nm-thick film with orientation was 331, which higher than that (∼236). This result is attributed to the fact polar axis (100)-oriented more tilted away from normal surface randomly oriented films. Also, tunabilities orientations ∼50% ∼59% at an applied field 400 kV/cm, Improved tunability has been texture leading enhancement in-plane-oriented axis.
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