作者: Kazuo Ishikawa
DOI: 10.1143/JJAP.4.461
关键词:
摘要: The dependence of the pumping speed and sensitivity a Bayard-Alpert gauge on electrode potentials has been measured for helium, argon krypton at pressures about 10-7 Torr. For it found that can be reduced with relatively small decrease in by lowering potentials, though accompanied is not helium. A increasing electron current observed explained as an effect space charge inside grid. ionic ion collector estimated to two or three orders magnitude lower than total speed.