摘要: Publisher Summary This chapter discusses the gauges for low-pressure measurement. It describes measuring force effect of gas (bourdon and diaphragm liquid-column manometers), kinetic effects (the decrement gauge, resonance rotating radiometer pirani thermocouple thermistor gauge), phenomena produced by charged particles crossing fluorescence attenuation electron-scattering, light-scattering brownian motion gauge. The principle on which all these work.
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