作者: Kotone Akiyama , T. Eguchi , T. An , Y. Fujikawa , Y. Yamada-Takamura
DOI: 10.1063/1.1865812
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摘要: We report on a focused-ion-beam fabrication of metal–tip cantilever for noncontact atomic force microscopy (AFM) and demonstrate its superior performance by observing atomically resolved AFM images the Si(111)7×7 surface. Characterization tip apex transmission electron microscope revealed that radius is less than 5nm. Detrimental changes in resonance frequency Q factor due to attachment metal are small do not affect imaging. Since technique applicable any materials, various functional probes can be developed with this method.