Fabrication of high-aspect-ratio platinum probes by two-step electrochemical etching.
作者： Z. Yi , M. Zhang
DOI: 10.1063/1.4928119
关键词: Auxiliary electrode 、 Nanotechnology 、 Voltage 、 Surface micromachining 、 Fabrication 、 Reactive-ion etching 、 Platinum 、 Electrochemistry 、 Etching (microfabrication) 、 Materials science
摘要: In this paper, a two-step AC electrochemical etching process was investigated for the fabrication of platinum probes with controllable aspect ratio from 10 to 30, and tip apex radius less than 300 nm. Experiment results show that shape obtained is quite sensitive time first step voltage applied in second step. A graphite crucible used as counter electrode during etching. It proved also play key role realizing high-aspect-ratio probes. The method presented here provides simple way micro-tool construction microstructures, especially 3D micromachining.
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sci-hub.se 参考文章(24)
B. Guenther, M. Maier, J. Koeble, A. Bettac, F. Matthes, C. M. Schneider, A. Feltz, High Precision Local Electrical Probing: Potential and Limitations for the Analysis of Nanocontacts and Nanointerconnects asim. pp. 1- 8 ,(2012) , 10.1007/978-3-642-28172-3_1
Muramatsu, Homma, Chiba, Yamamoto, Egawa, Dynamic etching method for fabricating a variety of tip shapes in the optical fibre probe of a scanning near-field optical microscope Journal of Microscopy. ,vol. 194, pp. 383- 387 ,(1999) , 10.1046/J.1365-2818.1999.00509.X
Kotone Akiyama, T. Eguchi, T. An, Y. Fujikawa, Y. Yamada-Takamura, T. Sakurai, Y. Hasegawa, Development of a metal–tip cantilever for noncontact atomic force microscopy Review of Scientific Instruments. ,vol. 76, pp. 033705- ,(2005) , 10.1063/1.1865812
U. J Quaade, L Oddershede, Electrochemical etching of sharp tips for STM reveals singularity EPL. ,vol. 57, pp. 611- 617 ,(2002) , 10.1209/EPL/I2002-00505-4
Massimiliano Cavallini, Fabio Biscarini, Electrochemically etched nickel tips for spin polarized scanning tunneling microscopy Review of Scientific Instruments. ,vol. 71, pp. 4457- 4460 ,(2000) , 10.1063/1.1311936
Gary W. Stupian, Martin S. Leung, A scanning tunneling microscope based on a motorized micrometer Review of Scientific Instruments. ,vol. 60, pp. 181- 185 ,(1989) , 10.1063/1.1140458
Inga Holl Musselman, Phillip E. Russell, Platinum/iridium tips with controlled geometry for scanning tunneling microscopy Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 8, pp. 3558- 3562 ,(1990) , 10.1116/1.576507
G. A. Valaskovic, M. Holton, G. H. Morrison, Parameter control, characterization, and optimization in the fabrication of optical fiber near-field probes Applied Optics. ,vol. 34, pp. 1215- 1228 ,(1995) , 10.1364/AO.34.001215
AS Walton, CS Allen, K Critchley, M Ł Górzny, RMD Brydson, BJ Hickey, SD Evans, None, Four-probe electrical transport measurements on individual metallic nanowires Nanotechnology. ,vol. 18, pp. 065204- ,(2007) , 10.1088/0957-4484/18/6/065204
T. Held, S. Emonin, O. Marti, O. Hollricher, Method to produce high-resolution scanning near-field optical microscope probes by beveling optical fibers Review of Scientific Instruments. ,vol. 71, pp. 3118- 3122 ,(2000) , 10.1063/1.1304866