Method for fabricating three-dimensional microstructures and a high-sensitivity integrated vibration sensor using such microstructures
作者： Kailash C. Jain , Jacob A. Abraham
DOI:
关键词:
摘要: A method for preferentially etching phosphosilicate glass to form a micromechanical structure includes forming layer of on substrate and opening at least one via in the layer. material which is patterned produce formed over extends through adheres substrate. The then removed by immersing device an etchant bath containing aqueous ammoniacal hydrogen peroxide solution. resulting has point attachment otherwise spaced apart from air gap. attaching overhanging mass miniature cantilever beam using microelectronics fabrication technology also provided center gravity shifted endpoint free end beam. There further integrated sensor transducing on-board detection circuitry detects extremely small motions produces corresponding digital output.
google.co.in 参考文章(15)
Klaus D. Beyer, Robert H. Kastl, Cleaning process for p-type silicon surface ,(1980)
Koichi Murakami, Method of manufacture for semiconductor accelerometer ,(1985)
Lawrence Keith White, Bilayer Taper Etching of Field Oxides and Passivation Layers Journal of The Electrochemical Society. ,vol. 127, pp. 2687- 2693 ,(1980) , 10.1149/1.2129573
Philip W. Barth, Method of making a semiconductor transducer having multiple level diaphragm structure Journal of the Acoustical Society of America. ,vol. 87, pp. 1834- 1834 ,(1985) , 10.1121/1.399343
L.M. Roylance, J.B. Angell, A batch-fabricated silicon accelerometer IEEE Transactions on Electron Devices. ,vol. 26, pp. 1911- 1917 ,(1979) , 10.1109/T-ED.1979.19795
Shigeo Hoshino, Semiconductor vibration detection device with lever structure Journal of the Acoustical Society of America. ,vol. 80, pp. 1865- 1865 ,(1984) , 10.1121/1.394238
W.D. Frobenius, S.A. Zeitman, M.H. White, D.D. O'Sullivan, R.G. Hamel, Microminiature ganged threshold accelerometers compatible with integrated circuit technology IEEE Transactions on Electron Devices. ,vol. 19, pp. 37- 40 ,(1972) , 10.1109/T-ED.1972.17368
K.E. Petersen, A. Shartel, N.F. Raley, Micromechanical accelerometer integrated with MOS detection circuitry IEEE Transactions on Electron Devices. ,vol. 29, pp. 23- 27 ,(1982) , 10.1109/T-ED.1982.20653
K.E. Petersen, Silicon as a mechanical material Proceedings of the IEEE. ,vol. 70, pp. 420- 457 ,(1982) , 10.1109/PROC.1982.12331
Manouchehr E. Motamedi, Method of fabricating a cantilever beam for a monolithic accelerometer ,(1986)